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Journal Introduction

Nanomanufacturing and Metrology

Nanomanufacturing and Metrology is the Journal of the International Society for Nanomanufacturing (ISNM). This international, interdisciplinary and open-access journal offers the first forum dedicated to research in nano-manufacturing and nano-metrology. Article publication charges (APCs) are waived.

Call for Papers 
Special Issue on "Machine learning in Precision and Micro/Nano Metrology"


The topics include but are not limited to:

  • Implementations of Machine learning (ML) in development of advanced metrology tools, including:

- Machine vision and smart computational imaging

- Interferometric optical metrology

- Scanning probe microscopy (SPM)

- Scanning electron microscopy (SEM)

- Optical scatterometry

- Hybrid metrology and data fusion

- Data augmentation in Precision and Micro/Nano Metrology (PMNM) using ML

- Calibration of sensors and measuring instruments

- Optical sensors and instrumentation

- Non-optical sensors and instrumentation

- Other emerging and innovative measuring techniques

  • Applications of ML in innovative and emerging industries, including:

- Precision surface texture analysis for condition monitoring and fault diagnosis

- Micro-defects identification or classification using ML methods

- Metrology and inspection in semiconductor industry

- Enhancing modeling for measurement techniques and/or uncertainty analysis

  • Remaining open issues of ML in PMNM

- Advanced ML techniques

- Explainable and Trustworthy ML in PMNM

February 24, 2023


Nanomanufacturing and Metrology presents original articles, cutting-edge communications, timely review papers, technical reports, and case studies. The journal will also publish special issues devoted to developments in important topics in nano-manufacturing and metrology.

Coverage spans the field, including topics related to:

  • Manufacturing and metrology at the micro-, nano- and atomic levels

  •  Physics, chemistry, and materials used in micro-, nano- and atomic manufacturing and metrology

  • Tools and processes for nano-manufacturing and nano-metrology

  • Provides a dedicated forum for nano-manufacturing and nano-metrology

  • Publishes research articles, reviews, communications, case studies and technical reports

  • Explores physics, chemistry, materials, tools, and processes used in micro-, nano- and atomic manufacturing and metrology

Published Paper list

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